Cover body for sheet supporting container and sheet supporting container

ABSTRACT

The present invention provides a lid unit for closing the container body  2  that is transported with thin-plates such as semiconductor wafers or the like accommodated therein. Simplified attaching/detaching mechanisms  32  for the production line are provided at the centers of the respective sides opposing with respect to each other. The simplified attaching/detaching mechanism  32  for the production line includes a locking plate  34  for locking the second fitted portion  21  and a drive-out member  35  for allowing the drive-out member  35  to rise and set by being engaged with the locking plate  34.  A locking arm  57  for fixing the drive-out member  35  is provided on the drive-out member  35  at the end in the direction of rotation. A supporting rail  56  for controlling the rising and setting movement of the locking plate  34  is provided on the drive-out member  35.  The locking plate  34  is supported pivotally and slidably, and is provided with a holding claw  51  for engaging the second fitted portion  21  at the distal end thereof. The thin-plate holding container  1  is used for transportation when the lid unit  4  for transportation is attached on the container body  2,  and is used for the production line when the lid body  5  for the production line is attached thereon.

TECHNICAL FIELD

[0001] The present invention relates to a lid unit for a thin-plateholding container and the thin-plate holding container, which enable acontainer body for accommodating thin-plates such as semiconductorwafers, memory disks or liquid crystal glasses for storage ortransportation to be used in a manufacturing process aftertransportation.

BACKGROUND ART

[0002] In general, a thin-plate holding container for accommodatingthin-plates such as semiconductor wafers or the like for storage ortransportation is publicly known.

[0003] Such thin-plate holding container mainly includes a containerbody, and a lid unit for covering the upper opening of the containerbody. The container body is provided with members for supporting thethin-plates such as semiconductor wafers or the like therein. Suchthin-plate holding container requires to be kept clean inside thereofduring transportation in order to prevent contamination or the like onthe surface of the thin-plates such as semiconductor wafers or the likeaccommodated therein. Therefore, the container is sealed off. In otherwords, the lid unit is fixed to the container body for sealing theinterior of the container off. There are various structures for fixingthe lid unit to the container body.

[0004] The plates are stored in the container body and the lid unit isfixed to the container body for sealing the interior thereof off in aplant for manufacturing plates such as semiconductor wafers. In thisstate, the containers are transported to a semiconductor manufacturingplant or the like. Generally, in the semiconductor manufacturing plant,the semiconductor wafers or the like are transferred to a specificcontainer for production line, and placed on a production line.

[0005] When transferring the semiconductor wafers or the like into theline-specific container as described above, the above-describedthin-plate holding container is used only for transportation, and thusis not necessary after transportation. Therefore, such thin-plateholding containers, after having been emptied, are returned to theoriginated plant or discarded. However, it is inefficient in terms ofusage, and may result in waste of resources and increase of wasteproducts.

[0006] Therefore, the present inventor has proposed an invention inwhich a lid unit receiving portion of the container body is improved soas to be capable of being fitted to various types of lid unit, wherebythe container body can also be used in the production line before(Japanese Unexamined Patent Application Publication No. 2000-289795).However, there remains a problem in that container bodies havingstructures different from such container body cannot be used in theproduction line.

[0007] In view of such circumstances, an object of the present inventionis to provide a lid unit for a thin-plate holding container, t and hethin-plate holding container, in which the container body, as it is, canalso be used in the production line after transportation and the like.

DISCLOSURE OF INVENTION

[0008] A lid unit for thin-plate holding containers according to a firstaspect of the invention is a lid unit for closing the container bodythat is transported with a plurality of thin-plates accommodatedtherein, characterized by being formed into a square shape and providedwith a simplified attaching/detaching mechanism for the production lineat the center of each opposing side.

[0009] In such a structure, since a simplified attaching/detachingmechanism for the production line is provided on the lid unit, a lidunit for the production line may be attached via the simplifiedattaching/detaching mechanism for production line on the container bodyprovided for transportation. As a consequence, the container body fortransportation can be used as a container body for the production lineas is.

[0010] The aforementioned simplified attaching/detaching mechanism forthe production line preferably includes: a locking plate for projectingand engaging the container body; and a drive-out member for allowing thelocking plate to rise and set by being engaged with the locking plate.

[0011] Accordingly, the lid unit for the production line may be attachedto and detached from the container body by allowing the locking plate torise and set by the drive-out member.

[0012] A locking arm is preferably provided on the aforementioneddrive-out member at the end in the direction of rotation.

[0013] Accordingly, the drive-out member may be reliably fixed at thepredetermined position after being rotated.

[0014] The aforementioned drive-out member is preferably provided with asupporting rail for controlling the rising and setting movement of thelocking plate.

[0015] Accordingly, the rising and setting movement of the locking plateis controlled by the supporting rail and thus the lid unit may bereliably fixed and reliably released from fixation.

[0016] The locking plate is preferably supported pivotally and slidably.

[0017] Accordingly, the lid unit may be reliably fixed to the containerbody by allowing the locking plate to slide into the container body, andto pivot to be brought into contact with the container body.

[0018] The aforementioned locking plate is preferably provided with aholding claw to be engaged with the container body at the distal endthereof.

[0019] Accordingly, the lid unit may be pressed toward and reliablyfixed to the container body by engaging the holding claw with thecontainer body.

[0020] The thin-plate holding container according to a second aspect ofthe invention includes: a container body that is transported with aplurality of thin-plates accommodated therein; and a lid unit forclosing the container body, characterized in that the lid unit for thethin-plate holding container as stated in any one of claim 1 to claim 6is used as said lid unit.

[0021] In such a structure, the thin-plate holding container may be usedfor the production line in the plant or the like after having been usedfor transportation.

BRIEF DESCRIPTION OF THE DRAWINGS

[0022]FIG. 1 is a plan view of a lid unit for a production lineaccording to an embodiment of the present invention.

[0023]FIG. 2 is a perspective view showing a thin-plate holdingcontainer for transportation.

[0024]FIG. 3 is a perspective view showing a container body of thethin-plate holding container.

[0025]FIG. 4 is a bottom view showing the container body of thethin-plate holding container.

[0026]FIG. 5 is a cross sectional view showing the container body of thethin-plate holding container.

[0027]FIG. 6 is a perspective view of a principal portion showing acontainer body of the thin-plate holding container.

[0028]FIG. 7 is a cross sectional view showing a principal portion of acontact portion between the lid unit for transportation and thecontainer body.

[0029]FIG. 8 is a perspective view showing a simplifiedattaching/detaching mechanism for transportation on the lid unit fortransportation.

[0030]FIG. 9 is a drawing showing a backside of a lid unit for theproduction line.

[0031]FIG. 10 is a front view showing the lid unit for the productionline.

[0032]FIG. 11 is a side view showing a lid unit for the production line.

[0033]FIG. 12 is a plan view showing a simplified attaching/detachingmechanism for the production line.

[0034]FIG. 13 is a plan view showing a locking plate.

[0035]FIG. 14 is a front view showing the locking plate.

[0036]FIG. 15 is a cross sectional view showing the locking plate.

[0037]FIG. 16 is a side view showing the locking plate.

[0038]FIG. 17 is a plan view showing a drive-out member.

[0039]FIG. 18 is a side view showing the drive-out member.

[0040]FIG. 19 is a front view showing the drive-out member.

[0041]FIG. 20 is a cross sectional side view showing the drive-outmember.

[0042]FIG. 21 is a cross sectional front view showing the drive-outmember.

[0043]FIG. 22 is a plan view showing a cover.

[0044]FIG. 23 is a cross sectional view showing the cover.

[0045]FIG. 24 is a cross sectional view of the principal portion showinga operating state of the simplified attaching/detaching mechanism forthe production line.

[0046]FIG. 25 is a cross sectional view of a principal portion showingthe operating state of the simplified attaching/detaching mechanism forthe production line.

BEST MODE FOR CARRYING OUT THE INVENTION

[0047] Referring now to the drawings, an embodiment of the presentinvention will be described. A thin-plate holding container of thepresent invention is devised in such a manner that thin-plates such assemiconductor wafers, memory disks, liquid crystal glasses and the likemay be accommodated for storage and transportation, and a container bodymay be used in the production line and the like as is aftertransportation. In this description, a thin-plate holding container foraccommodating semiconductor wafers is taken as an example.

[0048] The thin-plate holding container 1 according to the presentembodiment includes, as shown in FIGS. 1, 2 and 3, a container body 2for accommodating a plurality of semiconductor wafers (not shown)therein, two thin-plate holding portions 3 provided on both oppositeside walls in the container body 2 for holding the semiconductor waferaccommodated therein from both sides, a lid unit 4 for transportationand a lid unit 5 for the production line for closing the container body2, a top flange 6 to be gripped by an arm portion of a transportingdevice (not shown) in a plant, and a carrying handle 7 to be held by anoperator when he/she carries the thin-plate holding container 1 by hand.

[0049] The container body 2 is generally formed into a cubic shape as awhole as shown in FIGS. 3 to 5. The container body 2 is, in the state ofbeing vertically placed (the state shown in FIG. 3), constructed of foursidewall portions 2A, 2B, 2C and 2D that corresponds to a peripheralwall and a bottom plate portion 2E, and includes an opening 2F on topthereof. The respective sidewall portions 2A, 2B, 2C and 2D are formedwith a number of reinforcing vertical grooves 9. The container body 2 isplaced laterally when being installed so as to face toward a wafertransporting robot (not shown) in the semiconductor wafer productionline or the like. Outside the sidewall portion 2A that corresponds tothe bottom when being placed laterally, there are provided a positioningunit 11 for the thin-plate holding container 1. Outside the sidewallportion 2B that corresponds to a top ceiling when being placedlaterally, there is provided a top flange 6 so as to be detachable.Outside the sidewall portions 2C and 2D, which correspond to sidewallportion when placed laterally, a carrying handle 7 is detachablymounted. The carrying handle 7 is not limited to a bar-shaped handle,and may be other shapes such as a round grip handle and the like.

[0050] The aforementioned positioning unit 11 is constructed mainly ofthree fitting grooves 12. Each fitting groove 12 includes a firstfitting groove 12A for aligned with the vertical direction of thecontainer body 2, and a second and a third fitting grooves 12B and 12Cinclined by the same angle (about 60 degrees) with respect to thevertical direction of the container body 2. These three fitting grooves12 are formed with high degree of accuracy according to the standard.The thin-plate holding container 1 is may be positioned accurately byfitting the respective fitting grooves 12A, 12B and 12C of thepositioning unit 11 to fitting projections (not shown) on the mountingbase side, so that the semiconductor wafers may be taken in and out bythe wafer transporting robot.

[0051] The bottom plate portion 2E is provided with legs 13. Therespective legs 13 are formed into square shapes projecting downwardfrom four corners of the bottom plate portion 2E. When the containerbody 2 is placed vertically, the container body 2 is stably supported bythese four legs 13.

[0052] Supporting bases 15 for supporting the thin-plate holding portion3 to be detachably mounted thereto are provided inside the sidewallportions 2C and 2D of the container body 2. Each supporting base 15 isconstructed of a lower base portion 15A and an upper base portion 15B.Each respective supporting base 15 is provided with a supportingprojection 16. The supporting projection 16 is fitted to the thin-plateholding portion 3 to support the thin-plate holding portion 3.

[0053] As shown in FIG. 6 and FIG. 7, a lid unit receiving portion 17 towhich the lid unit 4 is fitted is provided at the upper end of thecontainer body 2. The lid unit receiving portion 17 is formed bybroadening the upper end of the container body 2 to the dimensionscorresponding to the lid unit 4. Accordingly, the lid unit 4 is fittedto the inside of a vertical plate 17A of the lid unit receiving portion17, and thus abuts on a horizontal plate 17B thereof, so as to becapable of being attached to the lid unit receiving portion 17. Thehorizontal plate 17B is further provide with a seal groove 17 c aroundthe whole periphery thereof, so that a gasket 18 mounted to the lowersurface of the lid unit 4 fits to seal the interior of the thin-plateholding container 1. The inner surface of the vertical plate 17A isformed with first fitted portions 19 to which lid unit locking claws 24of the simplified attaching/detaching mechanism 23 for transportation,which will be described later, fit to fix the lid unit 4 to thecontainer body 2. The first fitted portions 19 are formed by depressingthe vertical plate 17A into a square shape, so that lid unit lockingclaws 24, which will be described later, are fitted to the inner uppersurface thereof.

[0054] At the centers of the vertical plates 17A on the side of thesidewall portions 2C and 2D, there are formed of second fitted portions21, as shown in FIG. 3. The second fitted portions 21 are used in theproduction line. The second fitted portions 21 are adapted in such amanner that the locking plate 34 of the simplified attaching/detachingmechanism 32 for the production line of the lid unit 5 for theproduction line is fitted to fix the lid unit 5 for the production lineto the container body 2. The second fitted portions 21 are formed at thepositions, into the shapes and dimensions as specified in the standard.

[0055] The lid unit 4 for transportation is a publicly known lid unit,and is constructed as shown in FIGS. 2, 7 and 8. The lid unit 4 fortransportation is formed into a dish shape and the central portionthereof is raised into a cylindrical shape so as not to come intocontact with the upper portion of the semiconductor wafer to beaccommodated therein. The upper surface of the lid unit 4 is furtherformed with leg receiving portions 22, to which the legs 13 formed atthe bottom of the container body 2 are fitted, at four positionsthereof.

[0056] The lid unit 4 is provided at four corners thereof with thesimplified attaching/detaching mechanism 23 for transportation fordetachably fixing the lid unit 4 for transportation to the containerbody 2. The simplified attaching/detaching mechanism 23 fortransportation mainly constructed of a lid unit locking claw 24 formedso as to be projected from the peripheral edge of the lid unit 4 fortransportation, a flexible supporting plate 25 to which the lid unitlocking claw 24 is attached, and a releasing plate 26 extending from thesupporting plate 25 horizontally for releasing the lid unit locking claw24 by being pressed by the operator with his/her finger.

[0057] The lid unit 5 for the production line is a lid unit that enablesthe container body 2 of the transported thin-plate holding container 1to be used in the production line in the plant as is. The lid unit 5 forthe production line is stored in the semiconductor manufacturing plantand the like as a single product independently of the aforementionedthin-plate holding container 1. The lid unit 5 for the production lineis constructed as shown in FIG. 1 and FIGS. 9 to 11.

[0058] The lid unit 5 for the production line is generally formed into asquare shallow dish shape as a whole, so that it does not overhangoutward in a state of being attached to the lid unit receiving portion17 of the container body 2. The lid unit 5 for the production line isprovided with a gasket receiving portion 31 attached around the lowerportion thereof. The gasket receiving portion 31 is provided with agasket (not shown), and seals the interior of the container body 2 byfitting into the seal groove 17C in a state in which the lid unit 5 forthe production line is attached to the lid unit receiving portion 17.The gasket is formed as appropriate corresponding to the shape of theseal groove 17C. Since the seal groove 17C may not be formed into theshape of simple groove, the gasket is to be formed into the shapecorresponding to the shape of the groove.

[0059] On the upper surface of the lid unit 5 for the production line atthe centers of the edges of the longitudinal end portions thereof, thereare provided simplified attaching/detaching mechanism 32 for theproduction line for detachably fixing the lid unit 5 for the productionline to the container body 2. The positions of the simplifiedattaching/detaching mechanism 32 for the production line are setaccording to the standard. The simplified attaching/detaching mechanism32 for the production line includes a body recess 33, a locking plate34, drive-out member 35 and a cover 36.

[0060] The body recesses 33 on the lid unit 5 for the production lineare, as shown in FIG. 1, 9 and 12, formed by depressing the centers ofthe longitudinal end portions outward in semi-circular shapes. The bodyrecess 33 specifically includes an operating groove 38, a supportingcylinder 39, a locking pin 40, a supporting plate 41, an entrance groove42, an entrance hole 43, a locking shaft bearing 44, and supportingplate 45.

[0061] The operating groove 38 accommodates the drive-out member 35 forallowing it to rotate in accordance with the operation thereof. Theoperating groove 38 is shaped like elongated groove curved into asemi-circular shape.

[0062] The supporting cylinder 39 is a member for supporting rotation ofthe drive-out member 35 in association with the operation thereof andsupporting the rising and setting movement of the locking plate 34, andis formed into a cylindrical shape. The supporting cylinder 39 isdisposed at the center of the semi-circular operating groove 38.

[0063] The locking pin 40 is a pin for securing the drive-out member 35at a preset angle. The locking pin 40 fixes the drive-out member 35 at apreset angle by being locked by the locking arm 57, which will bedescribed later, of the drive-out member 35.

[0064] The supporting plate 41 is a plate member for supporting therising and setting movement of the locking plate 34. Two supportingplates 41 are disposed opposingly away from each other by a distancecorresponding to the width of the locking plate 34 so as to interposethe locking plate 34. The upper end portion of the supporting plate 41is provided with a pin supporting recess 41A for supporting a pivotalmovement supporting pin 50 on the locking plate 34. The pin supportingrecess 41A is formed to have a length that allows back and forthmovement of the pivotal movement supporting pin 50 occurring inassociation with the rising and setting movement of the locking plate34. These two supporting plates 41 define the entrance groove 42. Therising and setting movement of the locking plate 34 is guided andsupported by being attached to the entrance groove 42. The entrance hole43 is formed at the tip end of the entrance groove 42. The locking plate34 is adapted to project outward from the entrance hole 43 to engage thesecond fitted portion 21 of the container body 2 and fix the lid portion5 for the production line to the container body 2.

[0065] The aforementioned operating groove 38 is defined by providingprojection and recess on the single piece of lid unit 5 for theproduction line, and the front surface and the back surface of the lidunit 5 for the production line are never penetrated. In addition, therespective portions are formed to be a gentle line as a whole so thatgood water drainage is achieved.

[0066] The locking shaft bearing 44 is a member for supporting one endof the cover 36. Two locking shaft bearings 44 are provided on bothsides (at the positions opposing to the locking shaft 65 of the cover36, which will be described later) at the ends of the outsides (lowerside in FIG. 12) in a state in which the cover 36 is attached. Thelocking shaft bearing 44 is formed by an outwardly opened notch, andadapted to support one of the ends of the cover 36 by being fitted withthe locking shaft 65 of the cover 36 from outside.

[0067] The supporting plate 45 is a member for supporting the other endof the cover 36. Two supporting plates 45 are provided at the end inside(upper side in FIG. 12) in a state in which the cover 36 is attached.The supporting plate 45 includes the locking hole 45A to which a lockingrod 67, which will be described later, of the cover 36 is fitted, and anengaged portion 45B with which an engaging strip 68A of the retainingrod 68, which will be described later, engages.

[0068] The locking plate 34 is a member for fixing the lid unit 5 forthe production line to the container body 2. The locking plate 34 is, asshown in FIG. 12 to 16, includes an engaging hook 48, a rising andsetting movement supporting hole 49, the pivotal movement supporting pin50, and a holding claw 51.

[0069] The engaging hook 48 is formed into a C-shape, and fitted to andinterconnected with a supporting rail 56, which will be described later,of the drive-out member 35. The engaging hook 48 has an opening 48A, thediameter of which is set to a value slightly smaller than the innerdiameter thereof, and is slidably fitted to the supporting rail 56having a substantially circular cross section so as not to come off.

[0070] The rising and setting movement supporting hole 49 is a hole forsupporting the rising and setting movement of the locking plate 34, andis formed into an substantially oval shape at the center of the lockingplate 34. The rising and setting movement supporting hole 49 is fittedto and supported by the supporting cylinder 39 of the aforementionedbody recess 33.

[0071] The pivotal movement supporting pin 50 is provided on the lockingplate 34 so as to project laterally therefrom, and is supported withinthe pin supporting recess 41A of the aforementioned supporting plate 41.In this state, the pivotal movement supporting pin 50 supports thepivotal movement and the rising and setting movement of the lockingplate 34.

[0072] The holding claw 51 is a member for holding and fixing the lidunit 5 for the production line to the container body 2 by being fittedto the second fitted portion 21 of the container body 2 in a state inwhich the locking plate 34 is driven out by the drive-out member 35. Theholding claw 51 is formed by folding the distal end portion thereofupward so that the upper end portion thereof comes into press contactwith the upper surface of the aforementioned second fitted portion 21(the state shown in FIG. 25) to press the lid unit 5 for the productionline toward the container body 2 and support the same.

[0073] The drive-out member 35 drives the locking plate 34 out andallows the same to pivot upward and downward for fixing the lid unit 5for the production line to the container body 2. The drive-out member 35is constructed of a supporting column 55, a supporting rail 56, and alocking arm 57 as shown in FIG. 12 and FIGS. 17 to 21.

[0074] The supporting column 55 is a member for supporting rotation ofthe drive-out member 35. The supporting column 55 is rotatably supportedby being fitted to the supporting cylinder 39 of the aforementioned bodyrecess 33. A key groove 59 is formed on the upper surface of thesupporting column 55. The key groove 59 is formed as a substantiallyrectangular hole, to which a T-shaped release key (not shown) of thetransporting device in the plant is fitted. The release key isstandardized and the key groove 59 is formed correspondingly.

[0075] The supporting rail 56 is a member to be fitted to the engaginghook 48 of the locking plate 34 for directly allowing the locking plate34 to rise and set. The supporting rail 56 is formed in the range ofabout 90 degrees centered on the aforementioned supporting column 55,and includes a circular rod 61 fitted into the engaging hook 48 and asupporting plate 62 formed integrally with the circular rod 61. Thecircular rod 61 is formed into a radius and a height different fromthose of the supporting column 55. More specifically, the circular rod61 is constructed of a driving-out portion 61A and a pushing-up portion61B bordered at the central portion D thereof. The driving-out portion61A is formed in such a manner that the radius from the supportingcolumn 55 reduces gradually from the end (C position in FIG. 7) towardthe central portion D, so that the locking plate 34 is driven outwardwhen the engaging hook 48 is positioned at the central portion D and isretracted inward when the engaging hook 48 is positioned at the end C.The pushing-up portion 61B is formed in such a manner that the circularrod 61 is curved downward toward the end E to vary the height in a statein which the radius from the supporting column 55 maintained almostconstant. More specifically, when the engaging hook 48 is positioned atthe central portion D of the circular rod 61, the holding claw 51 at thedistal end of the locking plate 34 is maintained in a lowered state, andwhen the engaging hook 48 is positioned at the end E of the circular rod61, the engaging hook 48 is pressed downward to push the holding claw 51upward (the state shown in FIG. 25). Accordingly, when the engaging hook48 is moved from the end C of the circular rod 61 to the central portionD, the locking plate 34 is driven out from the entrance hole 43, andwhen it is moved from the central portion D to the end E, the holdingclaw 51 of the locking plate 34 in a state of being driven out from theentrance hole 43 is moved upward and brought into contact with the uppersurface of the second fitted portion 21 of the container body 2 so thatthe lid unit 5 for the production line is pressed and fixed to thecontainer body 2.

[0076] The locking arm 57 is a member for fixing the drive-out member 35in a state of being rotated to the rightmost or the leftmost position.The locking arm 57 includes a resilient arm 57A formed so as to extendoutward from the left and right ends of the supporting rail 56, and aarcuate locking claw 57B formed at the tip of the arm 57A for engagingthe aforementioned locking pin 40.

[0077] The cover 36 is a member for covering the locking plate 34 andthe drive-out member 35. In other words, the cover 36 is mounted so asto cover the locking plate 34 and the drive-out member 35 in a state inwhich the locking plate 34 and the drive-out member 35 are attached tothe body recess 33. The cover 36 is formed into a substantiallysemi-circular dish shape. The cover 36 is provided with a locking shaft65 at the upper and lower ends of the proximal end (right end in FIG.22). The locking shaft 65 is formed inwardly from the supporting plate66, and fitted to the locking shaft bearing 44 of the body recess 33 tofix the proximal end of the cover 36 to the body recess 33. Two lockingrods 67 are provided at the distal end of the cover 36, and the lockingrods fix the distal end of the cover 36 to the body recess 33 by beingfitted into the engaging hole 45A on the supporting plate 45 of the bodyrecess 33. The locking shaft 65 and the locking rod 67 are adapted to befitted to the locking shaft bearing 44 and the supporting plate 45 bymoving the cover 36 inwardly (toward the supporting plate 45). Tworetaining rods 68 are provided inside two locking rod 67. These tworetaining rods 68 have flexibility. Specifically, the retaining rod 68is formed to be directed outward, and includes the engaging strip 68A tobe engaged with the engaged portion 45B of the supporting plate 45 and afinger strip 68B to be pinched by fingers for releasing the engagingstrip 68A from the engaged portion 45B of the supporting plate 45.Engagement of the engaging strip 68A of the retaining rod 68 with theengaged portion 45B ensures fixation of the cover 36 to the body recess33, and release of the engaging strip 68A from the engaged portion 45Benables easy disengagement of the cover 36 from the body recess 33.

[0078] The lid unit 5 for the production line is provided with a waferholding portion 71 for supporting a semiconductor wafer accommodated inthe container body 2 on the backside thereof as shown in FIG. 1. Thewafer holding portion 71 includes a V-shaped holding strip 72 forsupporting the semiconductor wafer by being in direct contact with theperipheral edge thereof and a supporting arm 73 for resilientlysupporting the V-shaped holding strip 72.

[0079] The thin-plate holding container 1 thus constructed is used in afollowing manner.

[0080] The thin-plate holding container 1, in which the semiconductorwafers or the like are stored, is transported to the destination plantor the like. In this case, the lid unit 4 for transportation is attachedin a state in which the semiconductor wafers or the like are stored inthe container body 2. The lid unit locking claw 24 of the simplifiedattaching/detaching mechanism 23 for transportation of the lid unit 4for transportation is fitted to the first fitted portion 19 of the lidunit receiving portion 17 and thus the lid unit 4 for transportation isattached to the container body 2. Accordingly, the interior of thecontainer body 2 is completely sealed off when being transferred to thedestination plant or the like.

[0081] After it has arrived at the plant or the like, an operatorpresses the release strip 26 of the simplified attaching/detachingmechanism 23 for transportation of the lid unit 4 for transportationdownward with his/her finger to disengage the lid unit locking claw 24from the first engaged portion 19, and then dismounts the lid unit 4 fortransportation from the container body 2, and then feed thesemiconductor wafers or the like stored therein to the line in the plantor the like.

[0082] The thin-plate holding container 1 after usage is reused. In thedestination plant or the like, the container body 2 is attached with thelid unit 5 for the production line prepared in advance after washing. Inother words, the lid unit 5 for the production line is attached to thelid unit receiving portion 17 of the container body 2, and the releasekey is inserted and turned in the ken groove 59. Accordingly, thedrive-out member 35 is turned, and thus the locking plate 34 engagedwith the supporting rail 56 via the engaging hook 48 is driven out bythe driving-out portion 61A, and projects through the entrance hole 43and thus inserted into the second fitted portion 21 from the state shownin FIG. 24. Subsequently, the engaging hook 48 is pushed downward by thepushing up portion 61B, and the holding claw 51 is moved upward aboutthe pivotal movement supporting pin 50 as shown in FIG. 25 so as to bebrought into contact with and pressed toward the upper surface of thesecond fitted portion 21. Consequently, the supporting plate 41 ispushed downward by the pivotal movement supporting pin 50, and thus thelid unit 5 for the production line is fixed to the container body 2.

[0083] In order to dismount the lid unit 5 for the production line fromthe container body 2, the operator inserts the release key into the keygroove 59 and rotates it in the direction opposite from the direction inthe case described above. Accordingly, the drive-out member 35 is turnedin the opposite direction, and the engaging hook 48 moves along thesupporting rail 56 in the opposite direction from the case above. Inother words, the engaging hook 48 is pulled up and the holding claw 51moves downward and thus is retracted into the cover 36. As a consequent,fixation of the lid unit 5 for the production line is released, and thusthe operator dismounts it from the container body 2. In this manner, thecontainer body 2 is reused, from the container for transportation, forthe production line in the plant or the like.

[0084] The lid unit 4 for transportation is sent back because it is notbulky, and is used again for the transportation of the semiconductorwafer and the like.

[0085] Although the semiconductor wafer is taken as an example in theembodiment described above, the same advantages and effects as in theabove-described embodiment may be expected also in the case where othertypes of thin-plates such as the memory disk, and the liquid crystalglass substrate are used.

[0086] As described in detail above, according to the thin-plate holdingcontainer of the invention, the following effects are achieved.

[0087] (1) Since the lid unit 5 for the production line is used togetherwith the lid unit 4 for transportation, the container body 2 can be usedfor the thin-plate holding container 1 for transportation, as well asfor the thin-plate holding container 1 for the production line.

[0088] As a consequent, efficiency of usage is improved, waste ofresources is prevented, and generation of waste products is prevented.

[0089] (2) Since the simplified attaching/detaching mechanism 32 for theproduction line is provided on the lid unit 5 for the production line,the lid unit 5 for the production line may be attached to the containerbody 2 prepared for transportation via the simplifiedattaching/detaching mechanism 32 for the production line, and thus thecontainer body 2 used for transportation may be used for the productionline as is.

[0090] (3) Since the simplified attaching/detaching mechanism 32 for theproduction line is constructed of the locking plate 34 to be engagedwith the second fitted portion 21 of the container body 2 and thedrive-out member 35 to be engaged with the locking plate 34 for allowingit to rise and set, the lid unit 5 for the production line may easily beattached to and detached from the container body 2 by allowing thelocking plate 34 to rise and set with respect to the second fittedportion 21 by means of the drive-out member 35.

[0091] (4) Since the locking arm 57 is provided at the end of thedrive-out member 35 in the direction of rotation, the drive-out member35 may be reliably fixed at the predetermined position after beingrotated.

[0092] (5) Since the supporting rail 56 for controlling rising andsetting of the locking plate 34 is provided on the drive-out member 35,rising and setting movement of the locking plate 34 is controlled by thesupporting rail 56, and thus the lid unit 5 for the production line maybe reliably fixed and reliably released from fixation.

[0093] (6) Since the locking plate 34 is supported pivotally andslidably, the lid unit 5 for the production line may be reliably fixedto the container body 2 by allowing the locking plate 34 to slide intothe container body 2, and then to pivot to be brought into contact withthe container body 2.

[0094] (7) Since the locking plate 34 is provided with a holding claw 51to be engages with the container body 2 at the distal end thereof, thelid unit 5 of the production line may be pressed toward and reliablyfixed to the container body 2 by engaging the holding claw 51 with thesecond fitted portion 21 of the container body 2.

[0095] (8) Since the lid unit 5 for the production line is used as a lidunit for the thin-plate holding container 1, the thin-plate holdingcontainer 1 may also be used for the production line in the plant or thelike after having been used for transportation.

[0096] Industrial Applicability

[0097] As described thus far, the thin-plate holding container 1according to the present invention is useful for a carrier fortransporting semiconductor wafers, hard memory disks (magnet disks),base bodies of compact disks (CD), which must be absolutely protectedfrom occurrence of dust and the like. In addition to it, it is alsouseful for a carrier for transporting these products in the process ofproducing them.

1. A lid unit for a thin-plate holding container for closing thecontainer body that is transported with a plurality of thin-platesaccommodated therein, characterized in that the lid unit is formed intoa square shape and provided with a simplified attaching/detachingmechanism for the production line at the center of each opposing side.2. A thin-plate holding container according to claim 1, the lid unit forthe thin-plate holding container characterized in that said simplifiedattaching/detaching mechanism for the production line comprises alocking plate for projecting and engaging the container body, and adrive-out member for allowing the locking plate to rise and set by beingengaged with the locking plate.
 3. A thin-plate holding containeraccording to claim 2, the lid unit for the thin-plate holding containercharacterized in that a locking arm is provided on said drive-out memberat the end in the direction of rotation.
 4. A thin-plate holdingcontainer according to claim 2 or 3, the lid unit for the thin-plateholding container characterized in that said drive-out member comprisesa supporting rail for controlling the rising and setting movement of thelocking plate.
 5. A thin-plate holding container according to any one ofclaims 2 to 4, the lid unit for the thin-plate holding containercharacterized in that said locking plate is supported pivotally andslidably.
 6. A thin-plate holding container according to claim 5, thelid unit for the thin-plate holding container characterized in that saidlocking plate comprises a holding claw to be engaged with the containerbody at the distal end thereof.
 7. A thin-plate holding containercomprising a container body that is transported with a plurality ofthin-plates accommodated therein, and a lid body for closing thecontainer body, characterized in that the lid unit for the thin-plateholding container as stated in any one of claim 1 to claim 6 is used assaid lid unit.